JPS4959084A - - Google Patents
Info
- Publication number
- JPS4959084A JPS4959084A JP10114072A JP10114072A JPS4959084A JP S4959084 A JPS4959084 A JP S4959084A JP 10114072 A JP10114072 A JP 10114072A JP 10114072 A JP10114072 A JP 10114072A JP S4959084 A JPS4959084 A JP S4959084A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10114072A JPS4959084A (en]) | 1972-10-11 | 1972-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10114072A JPS4959084A (en]) | 1972-10-11 | 1972-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4959084A true JPS4959084A (en]) | 1974-06-07 |
Family
ID=14292762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10114072A Pending JPS4959084A (en]) | 1972-10-11 | 1972-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4959084A (en]) |
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1972
- 1972-10-11 JP JP10114072A patent/JPS4959084A/ja active Pending